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. DNG Studio 5.5.2.0.32;. 90. 91. 92. 93. 94. 95. 96. 97. 98. 99. 100. 101. 102. 103. 104. 105. 106. 107. 108. 109.1. Field of the Invention
The present invention relates to a coating solution used for a photoresist for a lithographic process using a KrF excimer laser or an ArF excimer laser as a light source for producing a fine pattern in the manufacturing process of a semiconductor device, a liquid crystal display device, or the like.
2. Description of the Related Art
As a chemically amplified photoresist used as a photoresist for a KrF excimer laser, an aromatic-polymer-based photoresist has been known. However, recently, as a chemically amplified photoresist used as a photoresist for an ArF excimer laser, a polyhydroxystyrene having a small molecular weight of xcex1-hydroxystyrene or a novolak resin having an acrylate group is used.
In the lithographic process using a lithographic technique, it is necessary to form a fine pattern having a size equal to or less than half the wavelength of the light source. Therefore, in the case of using ArF excimer laser as a light source, it is necessary to make the wavelength of the light source shorter in comparison with KrF excimer laser. As the light source having a short wavelength, recently, the development of a lithographic technique using an ArF excimer laser having a wavelength of 193 nm (refer to, for example, JP-A-3-14664) has been well advanced. In the ArF excimer laser lithography, it is considered that the development of a photoresist having a high sensitivity, an improved resolution and an excellent etching resistance is indispensable. However, when a chemical amplification photoresist is used in an ArF excimer laser lithography, a basic skeleton including a protective group of a photoacid generator has a strong absorption in a short wavelength region and a problem arises in that a thickness of the photoresist film decreases in the short wavelength region. Furthermore, even when a photoresist is used, when an amount of the
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Some observers believe that if Prime Minister Stephen Harper is to make good on his promise to bring in a new economic blueprint in the next federal election, it will either come in the form of a confessional speech or a new book.
On the eve of the budget, a New Democrat spokesman and a Liberal strategist say that Harper should come clean with his voters, and disclose his economic strategy in either a serious speech or a book after the Oct. 19 vote.
The Conservatives have often touted Harper’s planned speech in Toronto in which he is expected to outline his economic plan for the country. However, these analyses have also been peppered with warnings that the speech will only obscure the Tories’ plan.
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Either way, observers say that while Harper often appeared a little off kilter during his announcement of “Flat Tax Day” in April, that will be nothing compared to a major, public, nationally televised speech on the economy, which people will expect to get it right.
“My sense is that the speech will be delivered soon and it will be a confessional,” said Marc Mayrand, spokesman for former Liberal prime minister Paul Martin. “I think what you’re going to see is that, as the budget approaches and the election gets closer, Mr. Harper will no longer be Mr. Iron Man, and he will show more human weaknesses.”
“I think in two or three years, Stephen Harper would have a very respectable book to showcase his economic thinking,” said Andrew Coyne, a political commentator for the National Post. “But I don’t think he’ll have time to do it before the next election.”
Martin, Coyne and others point out that Harper’s government has already released a budget that does not provide
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