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For example, a master pattern is automatically drawn in accordance with an input picture signal of the circuit pattern. The drawing is performed by scanning a predetermined range of the pattern picture with a raster scan method or with a pattern projecting technique. The master pattern thus prepared is used as a mask for forming a resist film. The drawing technique requires a proper edge sharpness of the pattern and a high accuracy of the line width.
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However, in the prior art, since the shielding member of the size equal to the original pattern is utilized, the shielding member also reflects the light from the boundary portion of the original pattern. Therefore, the shielding member may be stained, and the edge sharpness of the shielding member deteriorates, so that the master pattern becomes unclear.
A method to solve such a problem is disclosed in Japanese Patent Disclosure No. 158461/79. According to this method, a plurality of shielding members having the same size as the original pattern are previously prepared. These shielding members are arranged opposite to the boundary portion of the original pattern and the light from the boundary portion of the original pattern is intercepted by the shielding member. Therefore,
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