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White Zombie Complete Discography @320 Kbps 35
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2 file are zipped and password is changed for security download ; White Zombie Complete Discography @320 Kbps 35.1. Field of the Invention
The present invention relates to a method of manufacturing a semiconductor device, and more particularly, to a method of forming a conductive layer having an end face with a non-planar side-wall shape by selectively filling a conductive layer on a recess portion formed in a semiconductor substrate.
2. Description of the Prior Art
Generally, in a semiconductor device, a number of semiconductor elements are formed on a semiconductor substrate. The semiconductor elements include, for example, a large number of transistors, diodes, etc. Then, a number of conductive layers such as wiring layers or electrode layers are formed on the semiconductor substrate, in which the conductive layers electrically connect the semiconductor elements to one another. Such conductive layers may be made of metal, polysilicon, silicon, etc.
In a selective deposition process for forming a conductive layer on a semiconductor substrate, an end face (i.e., a bottom face of the conductive layer) of the conductive layer may include a non-planar shape since the depositing material does not easily fill into a recess portion formed on the semiconductor substrate. Such a conductive layer may be difficult to perform a good electrical contact with an underlying conductive layer.
To form a planarized conductive layer on a recess portion in a semiconductor substrate, it is known that the semiconductor substrate is subjected to a planarization process before forming the conductive layer. However, in the planarization process, a plurality of additional processes are required.
Accordingly, an improved method is needed to form a conductive layer on a recess portion in a semiconductor substrate.Los Angeles Police Department Officer Eduardo Melendez will be charged with two felony counts of DUI manslaughter after a deadly crash Sunday night that involved a suspected drunken driver accused of fleeing the scene.
The California Highway Patrol reported that the crash occurred at the northbound
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